Near field scanning apparatus having an intensity distribution pattern detection

ABSTRACT

A sample analyzing apparatus includes a micro-aperture probe, which is provided with a light passage aperture having a diameter shorter than wavelengths of light, the light passage aperture being formed at a radiating end of the micro-aperture probe, and a light source, which produces light for sample analysis. An incidence optical system causes the light for sample analysis to enter into the micro-aperture probe from an entry end of the micro-aperture probe. A sample supporting member supports a sample at a position that is exposed to near field light radiated out of the radiating end of the micro-aperture probe. An image sensor receives light scattered by the sample and detects an intensity distribution pattern of the scattered light. A display device displays the detected intensity distribution pattern.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to an apparatus for analyzing a sample by theutilization of near field light, which is radiated out of amicro-aperture probe. This invention also relates to an apparatus forevaluating the performance of a micro-aperture probe, which is used in anear field optical microscope, or the like.

2. Description of the Prior Art

As apparatuses capable of analyzing the shape or structure of a samplesmaller than wavelengths of light, near field optical microscopes, suchas photon scanning tunnel microscopes, have heretofore been used. Thenear field optical microscopes are constituted such that, for example,near field light radiated out of a micro-aperture probe may be scatteredby a sample, and the intensity of the scattered light may be detected.Also, the micro-aperture probe is scanned, and a time series detectionsignal representing the intensity of the scattered light is taken as afunction of the position of the micro-aperture probe. In this manner,information, which represents the shape or structure of the sample, isobtained.

Ordinarily, in order for the micro-aperture probe to be formed, aradiating end portion of an optical fiber is pointed with an etchingprocess, and a metal film is then deposited on the pointed radiating endportion with a vacuum evaporation process. Thereafter, a portion of themetal film at the pointed end is removed, and an aperture is therebyformed at the pointed end.

With the near field optical microscopes having the constitutiondescribed above, the micro-aperture probe must be scanned, and thesignal, which represents the position of the probe during the scanning,must be obtained. Therefore, the aforesaid near field opticalmicroscopes has a drawback in that the structures cannot be kept simple.

SUMMARY OF THE INVENTION

The primary object of the present invention is to provide a sampleanalyzing apparatus, with which a shape or a structure of a sampleshorter than wavelengths of light is capable of being analyzed and whichhas a simple constitution.

Another object of the present invention is to provide a micro-apertureprobe evaluating apparatus, with which the performance of amicro-aperture probe (specifically, a distribution pattern of intensityof near field light radiated out of the micro-aperture probe), anoptimum state of polarization of incident light, and the like, arecapable of being evaluated accurately and easily.

The present invention provides a sample analyzing apparatus, comprising:

i) a probe of the same type as that used in a near field opticalmicroscope, i.e. a micro-aperture probe, which is provided with a lightpassage aperture having a diameter shorter than wavelengths of light,the light passage aperture being formed at a radiating end of themicro-aperture probe,

ii) a light source, which produces light for sample analysis,

iii) an incidence optical system, which causes the light for sampleanalysis to enter into the micro-aperture probe from an entry end of themicro-aperture probe,

iv) a sample supporting member, which supports a sample at a positionthat is exposed to near field light radiated out of the radiating end ofthe micro-aperture probe,

v) an image sensing means, which receives light scattered by the sampleand detects an intensity distribution pattern of the scattered light,and

vi) a displaying means, which displays the detected intensitydistribution pattern.

The present invention also provides a sample analyzing apparatus,comprising:

i) a micro-aperture probe, which is provided with a light passageaperture having a diameter shorter than wavelengths of light, the lightpassage aperture being formed at a radiating end of the micro-apertureprobe,

ii) a light source, which produces light for sample analysis,

iii) an incidence optical system, which causes the light for sampleanalysis to enter into the micro-aperture probe from an entry end of themicro-aperture probe,

iv) a sample supporting member, which supports a sample at a positionthat is exposed to near field light radiated out of the radiating end ofthe micro-aperture probe,

v) an image sensing means, which receives fluorescence produced by thesample exposed to the near field light and detects an intensitydistribution pattern of the fluorescence, and

vi) a displaying means, which displays the detected intensitydistribution pattern.

The intensity of the scattered light or the fluorescence described aboveis markedly low. Therefore, in the sample analyzing apparatuses inaccordance with the present invention, an image sensing means having ahigh sensitivity, e.g. a cooled CCD image sensor, should preferably beemployed.

The present invention further provides a micro-aperture probe evaluatingapparatus for evaluating the performance of a micro-aperture probe,which is provided with a light passage aperture having a diametershorter than wavelengths of light, the light passage aperture beingformed at a radiating end of the micro-aperture probe, the apparatuscomprising:

i) a light source, which produces light for evaluation,

ii) an incidence optical system, which causes the light for evaluationto enter into the micro-aperture probe from an entry end of themicro-aperture probe (i.e., from an end on the side opposite to theradiating end at which the light passage aperture is formed),

iii) an image sensing means, which receives traveling light radiated outof the radiating end of the micro-aperture probe and detects anintensity distribution pattern of the traveling light in a plane thatintersects with a direction of travel of the traveling light, and

iv) a displaying means, which displays the detected intensitydistribution pattern.

The micro-aperture probe evaluating apparatus in accordance with thepresent invention should preferably be provided with a collimatingoptical system, which collimates the traveling light radiated out of theradiating end of the micro-aperture probe and causes the collimatedtraveling light to impinge upon the image sensing means.

Also, the collimating optical system should preferably be combined withan image forming optical system for separating a portion of thecollimated traveling light, converging the separated portion of thecollimated traveling light, and thereby forming an image of thetraveling light radiated out of the radiating end of the micro-apertureprobe.

Further, the micro-aperture probe evaluating apparatus in accordancewith the present invention should preferably be provided with apolarization control means for controlling a state of polarization ofthe light for evaluation, which enters into the micro-aperture probe.Alternatively, the micro-aperture probe evaluating apparatus inaccordance with the present invention may be provided with means fordetecting a state of polarization of the traveling light, which has beenradiated out of the radiating end of the micro-aperture probe.

The intensity of the traveling light radiated out of the radiating endof the micro-aperture probe is markedly low. Therefore, in themicro-aperture probe evaluating apparatus in accordance with the presentinvention, an image sensing means having a high sensitivity, e.g. acooled CCD image sensor, should preferably be employed.

The sample analyzing apparatuses in accordance with the presentinvention have the effects described below. Specifically, the scatteredlight or the fluorescence described above has an inherent intensitydistribution pattern in accordance with the structure of the samplesmaller than wavelengths of light. Therefore, in cases where theintensity distribution pattern with respect to each sample structure isinvestigated previously, the sample structure can be predicted inaccordance with the displayed intensity distribution pattern of thescattered light or the fluorescence.

The micro-aperture probe evaluating apparatus in accordance with thepresent invention has the effects described below.

Specifically, it has been known that there is a correlation in intensitydistribution pattern between the traveling light and the near fieldlight, which are radiated out of the radiating end of the micro-apertureprobe. The correlation can be found with an electromagnetic analysisutilizing a Bethe's calculation formula, or the like. Also, theintensity distribution pattern of the near field light can be vieweddirectly with a near field optical microscope. Therefore, thecorrelation between the viewed pattern and the intensity distributionpattern of the traveling light can be found previously.

With the micro-aperture probe evaluating apparatus in accordance withthe present invention, the intensity distribution pattern of thetraveling light, which has been radiated out of the radiating end of themicro-aperture probe, can be detected by the image sensing means anddisplayed on the displaying means. The intensity distribution pattern ofthe near field light can then be found in accordance with the displayedpattern and the aforesaid correlation, which has been found previously,and the performance of the probe can thereby be evaluated.

As described above, in the micro-aperture probe evaluating apparatus inaccordance with the present invention, the traveling light, which hasbeen radiated out of the radiating end of the micro-aperture probe maybe collimated by the collimating optical system, and the collimatedtraveling light may be caused to impinge upon the image sensing means.In such cases, the intensity distribution pattern of the traveling lightcan be viewed directly.

Also, the collimating optical system may be combined with the imageforming optical system for separating a portion of the collimatedtraveling light, converging the separated portion of the collimatedtraveling light, and thereby forming an image of the traveling lightradiated out of the radiating end of the micro-aperture probe. In suchcases, adjustment of a focusing point can be carried out by viewing theimage, which is formed by the image forming optical system. Therefore,the traveling light can be collimated accurately.

Further, the micro-aperture probe evaluating apparatus in accordancewith the present invention may be provided with the polarization controlmeans for controlling a state of polarization of the light forevaluation, which enters into the micro-aperture probe, or the means fordetecting the state of polarization of the traveling light, which hasbeen radiated out of the radiating end of the micro-aperture probe. Insuch cases, it becomes possible to find the state of polarization of thetraveling light, which yields an optimum intensity distribution patternof the traveling light (and, consequently, an optimum intensitydistribution pattern of the near field light).

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side view showing an embodiment of the sample analyzingapparatus in accordance with the present invention,

FIG. 2 is a side view showing a first embodiment of the micro-apertureprobe evaluating apparatus in accordance with the present invention, and

FIG. 3 is a side view showing part of a second embodiment of themicro-aperture probe evaluating apparatus in accordance with the presentinvention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will hereinbelow be described in further detailwith reference to the accompanying drawings.

FIG. 1 shows an embodiment of the sample analyzing apparatus inaccordance with the present invention.

With reference to FIG. 1, the sample analyzing apparatus comprises amicro-aperture probe 10, which is of the same type as that used in anear field optical microscope, and a laser 12, which produces light (alaser beam) 11 for sample analysis. The sample analyzing apparatus alsocomprises a collimator lens 13 for collimating the laser beam 11, whichis divergent light, and a converging lens 14 for converging thecollimated laser beam 11 at an entry end of the micro-aperture probe 10(i.e., at its left end in FIG. 1). The sample analyzing apparatusfurther comprises a half-wave plate 15, which is located between thecollimator lens 13 and the converging lens 14 and serves as apolarization control device.

By way of example, the micro-aperture probe 10 is constituted of anoptical fiber and has a pointed radiating end (the lower end in FIG. 1).The radiating end of the micro-aperture probe 10 has a light passageaperture, which has a diameter shorter than wavelengths of light. Thelaser beam 11, which has been converged at the entry end of themicro-aperture probe 10 in the manner described above, enters into themicro-aperture probe 10 from the entry end, travels through themicro-aperture probe 10, and is radiated out of the light passageaperture of the radiating end.

At this time, near field light, which is an evanescent wave, is alsoradiated out of the light passage aperture of the micro-aperture probe10. When a sample 31 to be subjected to analysis is supported on asample supporting member 38 and placed in the near field light,scattered light 11S occurs. A converging lens 16 for collecting thescattered light 11S is located at the position, upon which the scatteredlight 11S impinges. Also, a beam splitter 21 separates a portion of thecollected scattered light 11S. The scattered light 11S, which has beenreflected from the beam splitter 21, is guided to an image forming lens22.

The scattered light 11S, which has passed through the beam splitter 21,passes through an analyzer 18 and impinges upon a beam splitter 33. Aportion of the scattered light 11S is reflected and separated by thebeam splitter 33. The separated portion of the scattered light 11Simpinges upon a cooled CCD image sensor 17. The scattered light 11S,which has passed through the beam splitter 33, is converged by aconverging lens 34 and guided to a photodetector 35. A photo detectionsignal S1, which is obtained from the photodetector 35, is fed into acontroller 36.

The sample supporting member 38 can be moved in X, Y, and Z directionsby a driving means 37, which may be constituted of a piezo-electricdevice, or the like. Therefore, the sample supporting member 38 can bescanned in the X and Y directions with respect to the micro-apertureprobe 10, and the photo detection signal S1, which represents theintensity of the scattered light 11S occurring at each scanningposition, can be detected as a function of the position of the sample.supporting member 38. The thus obtained function represents thedistribution of the evanescent field. Therefore, from the obtainedfunction, information representing the shape and structure of the sample31 can be obtained.

The driving means 37 is controlled by the controller 36. The position ofthe micro-aperture probe 10 with respect to the optical axis directionis detected by a position detecting device 32. A position detectionsignal S2, which has been obtained from the position detecting device32, is fed into the controller 36. In accordance with the positiondetection signal S2, the controller 36 controls the driving means 37such that the position of the sample supporting member 38 (and,consequently, the position of the sample 31) with respect to the Zdirection may be set at a desired position.

The scattered light 11S, which has been reflected from the beam splitter33 before being converged by the converging lens 34, impinges upon thecooled CCD image sensor 17. The cooled CCD image sensor 17 detects theintensity distribution pattern of the scattered light 11S and generatesan image signal S, which represents the intensity distribution patternof the scattered light 11S. The image signal S is fed into thecontroller 36 and subjected to predetermined image processing in animage processing unit of the controller 36. The image signal, which hasbeen obtained from the image processing, is fed into an image displayingmeans 19. The intensity distribution pattern of the scattered light 11Sis displayed on the image displaying means 19.

The intensity of the scattered light 11S is markedly low. However, inthis embodiment, the cooled CCD image sensor 17, which has a markedlyhigh sensitivity, is employed as the image sensing means. Therefore, theintensity distribution pattern of the weak scattered light 11S can bedetected clearly.

Ordinarily, the scattered light 11S has an inherent intensitydistribution pattern in accordance with the structure of the sample 31smaller than wavelengths of light. Therefore, an intensity distributionpattern with respect to each sample structure may be investigatedpreviously, and the sample structure can thereby be predicted inaccordance with the displayed intensity distribution pattern of thescattered light 11S.

In this embodiment, the direction of linear polarization of the laserbeam 11 before entering into the micro-aperture probe 10 can be alteredby rotating the half-wave plate 15. Also, the direction of polarizationcan be ascertained with the analyzer 18. In this manner, the state ofpolarization, which is appropriate for the sample analysis, can be set.

Also, this embodiment is provided with the beam splitter 21 forseparating a portion of the laser beam (traveling light) 11, which hasbeen radiated out of the radiating end of the micro-aperture probe 10and has then been collimated by the converging lens 16. The embodimentis further provided with the image forming lens 22 for converging theseparated portion of the laser beam 11 and forming an image of the laserbeam 11 radiated out of the radiating end of the micro-aperture probe10. The converging lens 16, the beam splitter 21, and the image forminglens 22 are supported by a lens tube 20. The lens tube 20 can be movedby a driving means (not shown) in the optical axis direction Z and inthe X and Y directions, which are normal to the optical axis directionZ.

Therefore, the operator can see the image, which is formed by the imageforming lens 22, and can thereby move the lens tube 20 in thethree-dimensional directions. In this manner, the operator can retainthe lens tube 20 at a position such that the image at the radiating endof the micro-aperture probe 10 may be viewed clearly.

In cases where the sample 31 is capable of producing the fluorescencewhen it is exposed to the near field light, the intensity distributionpattern of the fluorescence can be detected by the cooled CCD imagesensor 17 and displayed on the image displaying means 19. Ordinarily,the fluorescence has an inherent intensity distribution pattern inaccordance with the structure of the sample 31 smaller than wavelengthsof light. Therefore, an intensity distribution pattern of thefluorescence with respect to each sample structure may be investigatedpreviously, and the sample structure can thereby be predicted inaccordance with the displayed intensity distribution pattern of thefluorescence.

Embodiments of the micro-aperture probe evaluating apparatus inaccordance with the present invention will be described hereinbelow.FIG. 2 shows a first embodiment of the micro-aperture probe evaluatingapparatus in accordance with the present invention.

The probe evaluating apparatus shown in FIG. 2 is used for evaluatingthe performance of a micro-aperture probe 30, which is utilized in anear field optical microscope, or the like. The probe evaluatingapparatus comprises a laser 12, which produces light (a laser beam) 11for evaluation. The probe evaluating apparatus also comprises acollimator lens 13 for collimating the laser beam 11, which is divergentlight, and a converging lens 14 for converging the collimated laser beam11 at the entry end of the micro-aperture probe 30 (i.e., at its leftend in FIG. 2). The probe evaluating apparatus further comprises ahalf-wave plate 15, which is located between the collimator lens 13 andthe converging lens 14 and serves as a polarization control device.

By way of example, the micro-aperture probe 30 is constituted of anoptical fiber and has a pointed radiating end (the right end in FIG. 2).The radiating end of the micro-aperture probe 30 has a light passageaperture, which has a diameter shorter than wavelengths of light. Thelaser beam 11, which has been converged at the entry end of themicro-aperture probe 30 in the manner described above, enters into themicro-aperture probe 30 from the entry end, travels through themicro-aperture probe 30, and is radiated as divergent light out of thelight passage aperture of the radiating end.

At this time, together with the laser beam 11, which is the ordinarytraveling light, near field light is radiated out of the light passageaperture of the micro-aperture probe 30. In a near field opticalmicroscope, or the like, the near field light is utilized for theobservation, analysis, processing, or the like, of a sample. However, inthe probe evaluation, the near field light is not utilized directly.

A collimator lens 16 for collimating the laser beam 11 is located at theposition, upon which the laser beam (traveling light) 11 having beenradiated as divergent light out of the light passage aperture of themicro-aperture probe 30 impinges. Also, a cooled CCD image sensor 17 islocated at the position, upon which the laser beam 11 having beencollimated by the collimator lens 16 impinges. An analyzer 18 is locatedbetween the collimator lens 16 and the cooled CCD image sensor 17. Animage signal S, which is obtained from the cooled CCD image sensor 17,is fed into an image displaying means 19, which may be constituted of acathode ray tube (CRT) display device.

When evaluation of the performance of the micro-aperture probe 30 is tobe made, the laser beam 11 is caused to enter into the micro-apertureprobe 30 in the manner described above. The laser beam (traveling light)11 is radiated out of the micro-aperture of the micro-aperture probe 30.The radiated laser beam 11 is received by the cooled CCD image sensor17. At this time, the laser beam 11 impinges upon the cooled CCD imagesensor 17 as the collimated light such that the beam axis may be normalto the light receiving surface of the cooled CCD image sensor 17.Therefore, the intensity distribution pattern in the beam cross-sectionof the laser beam 11 is detected by the cooled CCD image sensor 17. Theimage signal S, which represents the intensity distribution pattern, isfed into the image displaying means 19, and the intensity distributionpattern is displayed on the image displaying means 19.

The intensity of the laser beam 11, which is the traveling light and hasbeen radiated out of the light passage aperture of the micro-apertureprobe 30, is markedly low. However, in this embodiment, the cooled CCDimage sensor 17, which has a markedly high sensitivity, is employed asthe image sensing means. Therefore, the intensity distribution patternof the weak laser beam 11 can be detected clearly.

As described above, there is correlation in intensity distributionpattern between the traveling light and the near field light, which areradiated out of the radiating end of the micro-aperture probe 30.Therefore, the correlation is found previously, and the intensitydistribution pattern of the near field light can be found from theintensity distribution pattern of the laser beam (traveling light) 11displayed on the image displaying means 19. In this manner, theperformance of the micro-aperture probe 30 can be evaluated.

In this embodiment, the direction of linear polarization of the laserbeam 11 before entering into the micro-aperture probe 30 can be alteredby rotating the half-wave plate 15. Also, the direction of polarizationcan be ascertained with the analyzer 18. In this manner, the intensitydistribution pattern of the laser beam 11 having been radiated out ofthe micro-aperture can be ascertained. Accordingly, the state ofpolarization, which yields the optimum intensity distribution pattern ofthe traveling light (and, consequently, the near field light), can befound.

A second embodiment of the micro-aperture probe evaluating apparatus inaccordance with the present invention will be described hereinbelow withreference to FIG. 3. Basically, the second embodiment is similar to thefirst embodiment of FIG. 2, except for the collimating optical system.Therefore, in FIG. 3, only the collimating optical system and thesubsequent portion are shown. In FIG. 3, similar elements are numberedwith the same reference numerals with respect to FIG. 2.

In the second embodiment, the collimating optical system is combinedwith a beam splitter 21 for separating a portion of the laser beam 11,which has been radiated out of the radiating end of the micro-apertureprobe 30 and has then been collimated by the collimator lens 16, and animage forming lens 22 for converging the separated portion of the laserbeam 11 and forming an image of the laser beam 11 radiated out of theradiating end of the micro-aperture probe 30.

The collimator lens 16, the beam splitter 21, the image forming lens 22,the analyzer 18, and the cooled CCD image sensor 17 are supported by alens tube 20. The lens tube 20 can be moved by a driving means (notshown) in the optical axis direction Z and in the X and Y directions,which are normal to the optical axis direction Z. When the laser beam 11impinges as the collimated light upon the image forming lens 22, theimage forming lens 22 forms the image of the laser beam 11 radiated outof the radiating end of the micro-aperture probe 30.

Therefore, the operator can see the image, which is formed by the imageforming lens 22, and can thereby move the lens tube 20 in thethree-dimensional directions. In this manner, the operator can retainthe lens tube 20 at a position such that the image at the radiating endof the micro-aperture probe 30 may be viewed clearly. As a result, thelaser beam 11, which is the traveling light, can be reliably caused toimpinge as the collimated light upon the cooled CCD image sensor 17.

In the second embodiment, as in the first embodiment of the probeevaluating apparatus, the intensity distribution pattern of the laserbeam (traveling light) 11 can be displayed on the image displaying means19 in accordance with the image signal S, which has been obtained fromthe cooled CCD image sensor 17. Also, the intensity distribution patternof the near field light can be found from the intensity distributionpattern of the laser beam 11 displayed on the image displaying means 19.In this manner, the performance of the micro-aperture probe 30 can beevaluated.

In the second embodiment, the image signal S, which has been obtainedfrom the cooled CCD image sensor 17, is fed into an image processingunit 23 and subjected to predetermined image processing. The imagesignal, which has been obtained from the image processing, is fed intothe image displaying means 19.

A third embodiment of the micro-aperture probe evaluating apparatus inaccordance with the present invention will be described hereinbelow withreference to FIG. 1. The third embodiment is built in the near fieldoptical microscope and is provided with the micro-aperture probe 10,which may be constituted of a long optical fiber. The micro-apertureprobe 10 takes on the form such that it can be processed in the samemanner as an ordinary optical fiber having flexibility. The basicconstitution and effects of the micro-aperture probe 10 are the same asthose of the micro-aperture probe 30 described above.

Also, in the third embodiment, the beam splitter 33 is located in theoptical path of the laser beam 11 having passed through the analyzer 18.The laser beam 11, which is the traveling light, is reflected from thebeam splitter 33 and guided to the cooled CCD image sensor 17.

As described above, together with laser beam 11, which is the travelinglight, near field light, which is an evanescent wave, is radiated out ofthe radiating end (i.e. the lower end in FIG. 1) of the micro-apertureprobe 10. When the sample 31 is placed in the near field light, thescattered light 11S occurs. The scattered light 11S is converged by theconverging lens 34 and guided to the photodetector 35. The photodetection signal S1, which is obtained from the photodetector 35, is fedinto the controller 36.

In the third embodiment, as in the first and second embodiments of theprobe evaluating apparatus in accordance with the present invention, theintensity distribution pattern of the laser beam (traveling light) 11can be displayed on the image displaying means 19 in accordance with theimage signal S, which has been obtained from the cooled CCD image sensor17. Also, the intensity distribution pattern of the near field light canbe found from the intensity distribution pattern of the laser beam 11displayed on the image displaying means 19. In this manner, theperformance of the micro-aperture probe 10 can be evaluated.

In the third embodiment, the image signal S, which has been obtainedfrom the cooled CCD image sensor 17, is fed into the controller 36.Predetermined image processing is carried out on the image signal S bythe image processing unit, which is provided in the controller 36. Theimage signal, which has been obtained from the image processing, is fedinto the image displaying means 19.

Also, in the third embodiment, the operator can see the image, which isformed by the image forming lens 22, and can thereby move the lens tube20 in the three-dimensional directions. In this manner, the operator canretain the lens tube 20 at a position such that the image at theradiating end of the micro-aperture probe 10 may be viewed clearly. As aresult, the laser beam 11, which is the traveling light, can be reliablycaused to impinge as the collimated light upon the cooled CCD imagesensor 17.

What is claimed is:
 1. A sample analyzing apparatus, comprising: i) amicro-aperture probe, which is provided with a light passage aperturehaving a diameter shorter than wavelengths of light, said light passageaperture being formed at a radiating end of said micro-aperture probe,ii) a light source, which produces light for sample analysis, iii) anincidence optical system, which causes the light for sample analysis toenter into said micro-aperture probe from an entry end of saidmicro-aperture probe, iv) a sample supporting member, which supports asample at a position that is exposed to near field light radiated out ofthe radiating end of said micro-aperture probe, v) an image sensingmeans, which receives light scattered by said sample and detects anintensity distribution pattern of the scattered light, and vi) adisplaying means, which displays the detected intensity distributionpattern.
 2. The sample analyzing apparatus as defined in claim 1 whereina cooled CCD image sensor is employed as said image sensing means. 3.The sample analyzing apparatus as defined in claim 1, wherein saidsample supporting member allows the scattered light to pass through. 4.The sample analyzing apparatus as defined in claim 1, further comprisinga beam splitter which at least partially reflects the scattered light tothe image sensing means.
 5. The sample analyzing apparatus as defined inclaim 4, wherein the sample, the sample supporting member, and the beamsplitter are all disposed substantially along an optical axis of thelight passage aperture.
 6. The sample analyzing apparatus as defined inclaim 5, wherein an order of the disposition is the light passageaperture, the sample, the sample supporting member, and the beamsplitter.
 7. A sample analyzing apparatus, comprising: i) amicro-aperture probe, which is provided with a light passage aperturehaving a diameter shorter than wavelengths of light, said light passageaperture being formed at a radiating end of said micro-aperture probe,ii) a light source, which produces light for sample analysis, iii) anincidence optical system, which causes the light for sample analysis toenter into said micro-aperture probe from an entry end of saidmicro-aperture probe, iv) a sample supporting member, which supports asample at a position that is exposed to near field light radiated out ofthe radiating end of said micro-aperture probe, v) an image sensingmeans, which receives fluorescence produced by said sample exposed tothe near field light and detects an intensity distribution pattern ofthe fluorescence, and vi) a displaying means, which displays thedetected intensity distribution pattern.
 8. The sample analyzingapparatus as defined in claim 7, wherein a cooled CCD image sensor isemployed as said image sensing means.
 9. The sample analyzing apparatusas defined in claim 7, wherein said sample supporting member allows thefluorescence to pass through.
 10. The sample analyzing apparatus asdefined in claim 7, further comprising a beam splitter which at leastpartially reflects the fluorescence to the image sensing means.
 11. Thesample analyzing apparatus as defined in claim 10, wherein the sample,the sample supporting member, and the beam splitter are all disposedsubstantially along an optical axis of the light passage aperture. 12.The sample analyzing apparatus as defined in claim 11, wherein an orderof the disposition is the light passage aperture, the sample, the samplesupporting member, and the beam splitter.